Research on Fabrication Techniques and Focusing Characteristics of Metalens

Metalenses have recently attracted increased attention due to their remarkable characteristics. The fabrication technology of metalenses has also become an important research direction. In this study, we propose a metalens structure based on Au–MgF2–Au in infrared waveband. preparation process the included magnetron sputtering, electron beam evaporation, and exposure. A dose test was performed during exposure process, adjusting minimize proximity effect after Then, SEM used measure processed structure, FDTD software build model metalens, simulating analyzing its focusing results show that size deviation produced processing little functionality metalens. can focus different polarized light incidences at spatial positions: 4.97 ?m for x-polarized 13.5 y-polarized light. Additionally, good effects with working wavelengths. We believe method proposed paper provides guidance subwavelength metasurface structures, our findings are beneficial developing new methods near-infrared regime manipulation.